Silicon to hydrogen bonding configurations and the multilayers investigate by pulse modulation plasma deposited hydrogenated amorphous silicon thin film
碩士 === 國立中興大學 === 電機工程學系 === 92 === This thesis uses pulse modulation plasma technology to control the RF-on time of the pulse generator and form the different films on the different hydrogen contents and different Si-H bonding configurations. The a-Si:H films are deposited under the process paramet...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91153895019329028458 |