| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 92 === Due to the incitement of nano-technology, many countries have urged to develop this epochal technology, treating which as the nations’ key industry. However, the development of nano-technology highly depends on nanoscale manipulation technique and hence high precision manufacturing process becomes critical. Ultrasonic linear motors, which possess the advantages of both long stroke and high precision, are capable of satisfying the requirement of a precision stage. This thesis studies a stator of a traveling-wave type ultrasonic linear motor which consists of a piezoelectric based actuator and viscoelastic structures due to that the stator vibration is an important key to the performance of ultrasonic motors. The Hamilton’s Principle and the assumed mode energy method are adopted to obtain the dynamic equations of the actuator and viscoelastic structures. The viscoelastic structure is modeled as a Timoshenko beam, and the GHM method is employed to account for the frequency dependent damping properties. By applying the continuity conditions in the interface of the actuator and viscoelastic structures, the two sets of equations can be coupled as the stator model. ANSYS is used to analyze the suitable dimension of the viscoelastic structures and feasibility of the stator. Through the analyses, the influence of various design parameters of the stator can be understood so that the proper stator design procedure can be induced to master the key technique of ultrasonic motor design.
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