Optical monitoring of thin-film through admittance diagram
碩士 === 國立中央大學 === 光電科學研究所 === 92 === Optical monitoring is the main method for determinating film thickness. Unlike monitoring by runsheet diagram, we raise a new method by admittance diagram. Runsheet has some popular defects such as diffcult to determinate the extreme point and ineffectiveness o...
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02696104381776448362 |
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ndltd-TW-092NCU056140102015-10-13T13:04:44Z http://ndltd.ncl.edu.tw/handle/02696104381776448362 Optical monitoring of thin-film through admittance diagram 利用導納軌跡圖做膜成長的光學監控 Yu-Ren Chen 陳裕仁 碩士 國立中央大學 光電科學研究所 92 Optical monitoring is the main method for determinating film thickness. Unlike monitoring by runsheet diagram, we raise a new method by admittance diagram. Runsheet has some popular defects such as diffcult to determinate the extreme point and ineffectiveness of observing film growth. Admittance diagram not only overcome these defects, but can oberve the variation of phase thickness. In this thesis, we vertify these qualities mathematically and by experiment. And real-time compensating by the property observing phase Cheng-Chung Lee 李正中 2004 學位論文 ; thesis 51 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
| description |
碩士 === 國立中央大學 === 光電科學研究所 === 92 === Optical monitoring is the main method for determinating film thickness. Unlike monitoring by runsheet diagram, we raise a new method by admittance diagram.
Runsheet has some popular defects such as diffcult to determinate the extreme point and ineffectiveness of observing film growth. Admittance diagram not only overcome these defects, but can oberve the variation of phase thickness.
In this thesis, we vertify these qualities mathematically and by experiment. And real-time compensating by the property observing phase
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| author2 |
Cheng-Chung Lee |
| author_facet |
Cheng-Chung Lee Yu-Ren Chen 陳裕仁 |
| author |
Yu-Ren Chen 陳裕仁 |
| spellingShingle |
Yu-Ren Chen 陳裕仁 Optical monitoring of thin-film through admittance diagram |
| author_sort |
Yu-Ren Chen |
| title |
Optical monitoring of thin-film through admittance diagram |
| title_short |
Optical monitoring of thin-film through admittance diagram |
| title_full |
Optical monitoring of thin-film through admittance diagram |
| title_fullStr |
Optical monitoring of thin-film through admittance diagram |
| title_full_unstemmed |
Optical monitoring of thin-film through admittance diagram |
| title_sort |
optical monitoring of thin-film through admittance diagram |
| publishDate |
2004 |
| url |
http://ndltd.ncl.edu.tw/handle/02696104381776448362 |
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