The Study on the Mechanism of Microlens Array Formation Using Thermal Reflow Process and Its Application

• Main Authors: Ming-Chang Jung, 鍾明昌
• Other Authors: Mau-Guo Wei
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/92950035317148038438

碩士 === 國立東華大學 === 材料科學與工程學系 === 92 === Abstract A real-time observation system will be proposed to observe and explain the formation of spherical microlens during thermal reflow process. Many instruments have been used to observe morphologies of the photoresist plates before and after thermal reflow treatment, including an optical microscope, a surface profiler, and a scanning electron microscope. According to the experimental results, several parameters can affect the morphology transformation of the photoresist plate during thermal reflow process, such as temperature, time, edge length(or diameter) and thickness of the plate, geometrical shape, and heating means. Furthermore, a two-stage mechanism of thermal reflowing for the square-based photoresist plate will be illustrated. Additionally, the geometrical parameters of thermal-reflowed microlens can be obtained through a theoretical calculation. Finally, the influence of the microlens array on the output coupling efficiency of the organic light-emitting diodes will be discussed.