| Summary: | 碩士 === 國立清華大學 === 工程與系統科學系 === 92 === Design and fabricate thin-disc edge-driving ultrasonic actuators as foundation to position stage system in this research thesis. Servomechanisms with ball screws are used in most of transportation systems now. But this type of mechanism has a backlash problem in positioning system and the cost is high to demand driving elements with precise dimensions. We plan to adopt thin-disc edge-driving ultrasonic actuators developed by us as actuating elements to drive X-Y table directly for sake of promoting precision positioning, avoiding electromagnetic interference, laminating mechanism design and reducing the cost. Then long distance and micrometer precise position can be achieved within the novel mechanism via the design of robust controller.
The mechanical design of ultrasonic actuator as well as X-Y table will be verified at first in research approach. The performance of ultrasonic actuators will be measured and the driving parameters will be set well by experimentation. Then the static and dynamic features of the constructed X-Y table will be measured and analyzed. Design single-input fuzzy logic controller as orienting control. Finally, combine it in double axles orient the electromechanical system of the stage and test the whole organization and performance of orientation, such as orienting test, speed of stage, step displacement. It makes it resist the disturbance to adjust the system parameter in order to possess the abilities of precision, stability and fast positioning. By this experimental result, using the double axles orienting stage and single-input fuzzy logic control can make the precision of oriented reach 0.5μm. As well as the ultrasonic actuators have capability as step motor, and its minimum step displacement can reach several micro of grades.
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