Design and Fabricate of Two-axial Ultrasonic Stage
碩士 === 國立清華大學 === 工程與系統科學系 === 92 === Design and fabricate thin-disc edge-driving ultrasonic actuators as foundation to position stage system in this research thesis. Servomechanisms with ball screws are used in most of transportation systems now. But this type of mechanism has a backlash problem in...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6y787v |