應用於感測半導體製程監控之APM感測器之研製

• Main Author: 謝政宇
• Other Authors: 柳克強
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/3j54cy

碩士 === 國立清華大學 === 工程與系統科學系 === 92 === The main purpose to study in this thesis is the fabrication and the application of APM sensor. APM sensor in this thesis divide into two kinds of application：One is applying to detect real-time cells growth with APM sensor. The other is using APM sensor as an ICP etching chamber monitor device. However dewing to the broke down of ICP, the originally application of APM sensor as a ICP monitoring device can’t be achieve. So this thesis concentrates on APM sensor using for monitoring real-time cell growth. (Therefore, should this thesis with more suitable topic is using APM sensor for real-time cell growth detection.) Because the IDT (Inter Digital Transducer) and sensing surface of the APM sensor are separated into different sides. And the substrate is ST-cut quartz a low piezoelectricity material. We can culture cells without needing extra treatment. In designing APM sensor, use mathematics software Maple, as analyzing that the wave propagates and mode couples issue. The sensor is fabricated on a 500 �慆 ST-cut quartz substrate with 50 pairs copper IDT. The fundamental frequency of the APM sensor is 31MHz. Probe into the sensitivity when APM sensor changes to different viscosities at first, then using glycerol-water mixture solution for APM sensor measurement. The change of the viscosity is from 6.08 cp to 455.47 cp. It is 0.019 degrees / cp in 31.485 MHz that the phase changes as the sensitivity; it is 0.061 degrees / cp in 57.79 MHz. The experiment of monitoring real-time cell growth was carried out by using the rabbit eyes cornea cell (CCL60) . The measurement began after 23 hours since the cell was planting on the APM sensor. The experiment shows an average sensitivity of cell growth as 3.122 degree/ (70 cells/mm2).