The design of micro-capacitive sensing circuit for inertial sensor
碩士 === 國立清華大學 === 微機電工程研究所 === 92 === This thesis researched the micro-capacitive sensing circuit for inertial sensor which used to sense poor signal in air bag or navigation. Due to the sensing capacitive signal was extremely small (10-15F), so it needed a noiseless and a high precision circuit for...
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ndltd-TW-092NTHU56570012019-05-15T19:38:04Z http://ndltd.ncl.edu.tw/handle/xey9cy The design of micro-capacitive sensing circuit for inertial sensor 應用於慣性感測器之微電容感測電路設計 鍾啟晨 碩士 國立清華大學 微機電工程研究所 92 This thesis researched the micro-capacitive sensing circuit for inertial sensor which used to sense poor signal in air bag or navigation. Due to the sensing capacitive signal was extremely small (10-15F), so it needed a noiseless and a high precision circuit for sensing. Thesis introduced typically four type sensing circuit , analyzed the source of nonideal effect and improvement. We chose the differential type of sensing circuit, because this architecture could cancel the common mode noise, stray capacitance and easy to analysis. The first generation of circuit design included of two matching micro-capacitive sensing circuit , noiseless differential amplifier and the input were controlled by two out of phase clock signal. The second generation of circuit design included of two matching micro-capacitive sensing circuit , two stage high gain amplifier. Layout used capacitance match , guard rings to protect core circuit and lower the interfere of EM. The simulation results of first generation circuit showed that output gain was 19V/pF and the total noise was about 1.26 mV. So that the circuit resolution was about 0.7fF, but experiment showed the circuit resolution was about 50~100fF. We knew that the error were due to noise and dc offset. The simulation results of second generation circuit showed that output gain was 190V/pF and the total noise was about 2.7386 mV. So that the circuit resolution was about 10aF. 曾繁根 柳克強 2004 學位論文 ; thesis 78 zh-TW |
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碩士 === 國立清華大學 === 微機電工程研究所 === 92 === This thesis researched the micro-capacitive sensing circuit for inertial sensor which used to sense poor signal in air bag or navigation. Due to the sensing capacitive signal was extremely small (10-15F), so it needed a noiseless and a high precision circuit for sensing. Thesis introduced typically four type sensing circuit , analyzed the source of nonideal effect and improvement. We chose the differential type of sensing circuit, because this architecture could cancel the common mode noise, stray capacitance and easy to analysis. The first generation of circuit design included of two matching micro-capacitive sensing circuit , noiseless differential amplifier and the input were controlled by two out of phase clock signal. The second generation of circuit design included of two matching micro-capacitive sensing circuit , two stage high gain amplifier. Layout used capacitance match , guard rings to protect core circuit and lower the interfere of EM.
The simulation results of first generation circuit showed that output gain was 19V/pF and the total noise was about 1.26 mV. So that the circuit resolution was about 0.7fF, but experiment showed the circuit resolution was about 50~100fF. We knew that the error were due to noise and dc offset. The simulation results of second generation circuit showed that output gain was 190V/pF and the total noise was about 2.7386 mV. So that the circuit resolution was about 10aF.
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曾繁根 |
author_facet |
曾繁根 鍾啟晨 |
author |
鍾啟晨 |
spellingShingle |
鍾啟晨 The design of micro-capacitive sensing circuit for inertial sensor |
author_sort |
鍾啟晨 |
title |
The design of micro-capacitive sensing circuit for inertial sensor |
title_short |
The design of micro-capacitive sensing circuit for inertial sensor |
title_full |
The design of micro-capacitive sensing circuit for inertial sensor |
title_fullStr |
The design of micro-capacitive sensing circuit for inertial sensor |
title_full_unstemmed |
The design of micro-capacitive sensing circuit for inertial sensor |
title_sort |
design of micro-capacitive sensing circuit for inertial sensor |
publishDate |
2004 |
url |
http://ndltd.ncl.edu.tw/handle/xey9cy |
work_keys_str_mv |
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1719092198556827648 |