| Summary: | 碩士 === 國立臺灣大學 === 應用力學研究所 === 92 === A simple mechanical model is set up to relate the ntermolecular forces and the surface resultant forces and the tip deflection of the micro-cantilever beam. A computer simulation including a random docking process is performed to develop simulating the relationship between the tip deflection and docking time. Comparing with experimental data, the tendency is consistent. Besides, due to the convenience of the piezo-resistive cantilever sensors without resorting to laser detection, a finite element analysis is made for the better design of the piezo-resistive cantilever sensors with different shape of holes, which can heighten the sensitivity of detection.
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