RF MEMS Circuit and Inductor
碩士 === 國立臺灣大學 === 電子工程學研究所 === 92 === A new technology based on MEMS processes is developed to improve RFICs. On-chip inductor with Q-factor enhancement is realized by micromachining. The substrate under inductors is successfully etched and removed. Qmax of a 3.5 turn inductor increased by 22% after...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35463115766211090187 |