Study on FEM analysis procedure for Poly-Si Film Crystallization
碩士 === 國立臺灣科技大學 === 機械工程系 === 92 === The use of Excimer laser to produce poly-Si thin film with large grain sizes is one of the most concentrated research topics in the TFT display field. The setting of many parameters will influence the qualities of the poly-Si thin film, but there is no general re...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96643173964839934617 |