| Summary: | 碩士 === 國立臺灣科技大學 === 機械工程系 === 92 === This research is to investigate the measurement uncertainty analysis and to analyze the stylus tip geometry and to reconstruct the tip profile with traced surface roughness gage via <a href="http://www.ntsearch.com/search.php?q=contact&v=56">contact</a> stylus instrument. A stylus tip of radius 5 m is used in the Hommelwerke T4000 surface roughness analyzer to measure a traced roughness gage of sine wave with Ra = 2.95 m. A stylus tip profile reconstruction method has been developed and the most allowable tip profile can be obtained from the measured profile image and the traced gage profile. Moreover, the surface roughness parameter can be estimated with the developed tip profile reconstruction and tested with simulated sine wave, rectangular wave and triangular wave gages, each with different amplitude and frequency. Results show that the simulated Ra is larger than the given Ra and the simulated Rt is less than the given Rt for the triangular wave gages. Therefore, the developed tip profile reconstruction method can be further used to estimate the wear of tip and uncertainty of tip geometry in metrology. Uncertainty analysis is based on ” Guide to the Expression of Uncertainty in Measurement of ISO” to assess eight error source, including uncertainty of setting standard, uncertainty of offset correction, uncertainty of repeat measurement, uncertainty of measured profile, uncertainty of reference plane, uncertainty of residual profile, uncertainty of plastic deformation and uncertainty of tip wearing to the influence on the system. Experimental results show that uncertainty of systematic reference plane and residual profile are larger than other six error sources. Future works focus on developing related metrology on nano roughness study.
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