Growth and Characteristics of InN Thin Film on Sapphire by RF Reactive Magnetron Sputtering
碩士 === 國立臺北科技大學 === 光電技術研究所 === 92 === Growth of polycrystalline Indium Nitride thin film on (00.1) Sapphire substrate by rf reactive magnetron sputtering was studied. By changing the deposition conditions such as substrate temperature, nitrogen flow rate and RF power, we found...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63674160554283635906 |