Development of Ultrasonic Microholes Drilling and Process Parameters Optimization

碩士 === 國立臺北科技大學 === 製造科技研究所 === 92 === The objective of this research is to develop the technology and equipment of ultrasonic machining applied in the hole drilling in a thin glass material. Our research endeavor will be focused on the design and development of a highly efficient ultrasonic machini...

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Bibliographic Details
Main Authors: Yi-Yuan Cho, 卓益淵
Other Authors: Tsing-Tshih Tsung
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/15357538990775521424
Description
Summary:碩士 === 國立臺北科技大學 === 製造科技研究所 === 92 === The objective of this research is to develop the technology and equipment of ultrasonic machining applied in the hole drilling in a thin glass material. Our research endeavor will be focused on the design and development of a highly efficient ultrasonic machining process with multiple tool heads for manufacturing the multi-hole glass wafer. Ultrasonic machining (USM) is a mechanical process designed to machine hard and brittle materials. A transducer causes an attached tool to oscillate linearly at a frequency (about 20 kHz) and suitable amplitude (about 0.010 mm). USM removes materials by abrasive grains that are carried in a liquid between tool and workpiece, and bombards the workpiece surface at high velocity. The optimization experiments are schemed using robust design in the research and the effect level of individual parameters of drilling efficiency and drilling quality are determined from the analysis results of the organized experiments. The fuzzy inference technique is also used for the multiple quality evaluation in this research. For the robust design is not well at handling the problems of multiple quality evaluation. We implement the robust design with the fuzzy inference technique to find the optimization parameters of multiple quality evaluation. The confirmation experiments are performed to verify the predicted results of the evaluation for understanding the process parameter adjustments of ultrasonic machining in the different manufacturing request. Considering the single quality evaluation, we find the main factor of drilling efficiency is the tool amplitude and the main factor of drilling quality is the volume ratio of abrasive. Considering the Multiple quality evaluation, the main factor of multi-response is volume ratio of abrasive and initial force.