Identification of Airborne Molecular Contaminants in TFT-LCD Cleanroom
碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 92 === This research uses a Thin Film Transistor Liquid Crystal Display (TFT-LCD)fabrication cleanroom as the subject of study. Airborne molecular contaminations (AMC) in actual operating conditions were measured for spatial distribution. Different measurement meth...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2004
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Online Access: | http://ndltd.ncl.edu.tw/handle/28200106759596790059 |