Identification of Airborne Molecular Contaminants in TFT-LCD Cleanroom

Identification of Airborne Molecular Contaminants in TFT-LCD Cleanroom

碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 92 === This research uses a Thin Film Transistor Liquid Crystal Display (TFT-LCD）fabrication cleanroom as the subject of study. Airborne molecular contaminations (AMC) in actual operating conditions were measured for spatial distribution. Different measurement meth...

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Bibliographic Details
Main Authors:	Hsu Jung Lang, 許榮郎
Other Authors:	Chuah Yew Khoy
Format:	Others
Language:	zh-TW
Published:	2004
Online Access:	http://ndltd.ncl.edu.tw/handle/28200106759596790059

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