Study of DLC Field Emission Device Fabricated by Thick-Film Technology

• Main Authors: Jian-Min Jeng, 鄭健民
• Other Authors: Jyi-Tsong Lo
• Format: Others
• Language: en_US
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/46232304983880974693

碩士 === 大同大學 === 光電工程研究所 === 92 === Our purpose is to deposit diamond-like carbon (DLC) films by reactive R.F. sputtering deposition, scrape the DLC films to be the DLC powder, and manufacture into DLC paste. In order to realize the fabricated possibility of large area field emission display on glass substrate, we completed the field emission devices on glass substrates by thick film technique. When depositing DLC films, reactive gas CH4 and H2 were introduced to increase the surface roughness DLC films and reduce the adhesion between the DLC films and substrate. These results can improve the field emission properties and be easier to scrape the DLC films to be the DLC powder. We have manufactured the 21×21 emitter array successfully on cathode by DLC paste printing. The current density of emission site is 249.68μA/cm2 (at 12.22 V/μm).