Fabrication of InGaAs/GaAs IR Resonant-Cavity LED

碩士 === 清雲科技大學 === 電子工程研究所 === 93 === This paper proposes a high-performance IR to overcome the influence of communication speed. The DBR is consisted of high and low refractive index materials, which contain thickness of 1/4 wavelength, respectively. The LED automation rate will reach <50MHz. The...

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Bibliographic Details
Main Authors: Yi-Hao Wu, 吳益豪
Other Authors: Lih-Wen Laih, Rong-Moo Hong
Format: Others
Language:en_US
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/11394133920466271074
Description
Summary:碩士 === 清雲科技大學 === 電子工程研究所 === 93 === This paper proposes a high-performance IR to overcome the influence of communication speed. The DBR is consisted of high and low refractive index materials, which contain thickness of 1/4 wavelength, respectively. The LED automation rate will reach <50MHz. The RCLED is easy of fabrication, high yield rate and safety. In this project, the automation rate will reach 50~500 MHz. In RCLED, due to the resonance, the output light is small beam divergence angle, light high-grade <10nm and light wavelength 600~1500nm, higher power and emitting directionality. In LED, the output light is large beam divergence angle, light low-grade 30~50nm and light wavelength 30~50nm. The improved performance relative to conventional GaAs QW structure grown in the same reactor was attributed to the increased gain and reduction in transparency current associated with strained QWs. The pattern in the photoresist is formed by exposing the devices covered with a photomask to the high density ultraviolet light for 20 seconds, followed by rinsing the sample in a developing solution for 40 seconds. After mesa photography, the devices were put into a Teflon beaker for wet etching. The metal contacts were deposited using thermal evaporator. This procedure made the contact between the semiconductor and metal to an ohmic contact. Main asset, it is very small of scatter angle and the very fast of communication speed. The High-Performance IR is proposed in this paper to demonstrate the effectiveness of L-I-V and PL approach .