| Summary: | 碩士 === 國立成功大學 === 工程科學系碩博士班 === 93 === This paper presents a microfluidic chip capable of automatically performing precise and continuous pH measurements. It is an electrochemical sensing system integrated with a microfluid and environmental monitoring system based on MEMS-technology. The chip’s microfluidic control devices and microchannels are made of PDMS (Polydimethylsiloxane), and its reference electrodes fabricated with AgCl. One of the two sensing electrodes is fabricated by sputtering a layer of SLBTLO (SiO2-LiO2-BaO-TiO2-La2O3) for evaluating pH value. The ion selective membrane on the second electrode is made from ETH 129（ N, N, N’, N’-tetracyclohexyl-3-oxa-pentane-diaminde）which allows for the sensing of calcium ion concentration. Temperature sensors feed back information around the sensing electrodes to immediately calibrate the electrochemical sensors. A flow sensor monitors the flow rate of the micropumps to measure the volume of sample transported. The performance of the developed sensing chip is close to that of traditional sensing systems. The sensitivity of pH value and calcium ion concentration is -57.74mV/pH and 34.7mV/decade. The chip can simultaneously detect hydrogen and calcium ion concentration within 200 seconds and the sample size needed is 100μL. Additionally, a pneumatic fluid-control device facilitates the automatic sample injection and a continuous sensing operation. The developed system can provide a convenient and portable tool in a wide range of biomedical applications.
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