Sputter Depositionof ZnO nanowires/nanorods on Si

• Main Authors: Ming-Ta Chen, 陳銘達
• Other Authors: Jyh-Ming Ting
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/23282791309328257535

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 93 === 　　Various techniques have been used to grow ZnO nanorods and a common mechanism to explain the growth of ZnO nanorods or nanowires is the vapor-liquid-solid (VLS) mechanism. Different from these processes and the VLS growth mechanism, we have reported in previous papers【1,2】, a new route for the growth of ZnO nanorods using a sputter deposition technique.It was found that the coating of an electroless copper layer on the substrate is critical for the formation of ZnO nanorods. It also appears that the VLS fails to explain the growth mechanism and the growth mechanism is still unclear. Therefore, as a part of the effort to explore the unknown growth mechanism, we have investigated the effect of various copper coatings and ZnO deposition parameters on the formation of ZnO nanorods. The formation of ZnO nanorods is discussed.