Investigation for The Electrical and ptical Properties of Antimony Doped ZnO Films Grown by RF Sputtering
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 93 === Abstract In this study, the Antimony (Sb) -doped zinc oxide films were prepared by diffusing Antimony into ZnO films. Sb -doped zinc oxide film ware found to possess superior conductivity and transmittance at ultraviolet wavelength. We investigated the opti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08183602636017983245 |