Design of Surface Acoustic Wave Gyroscope

• Main Authors: Shih-Chuan Chiu, 邱仕釧
• Other Authors: Tony Chen
• Format: Others
• Language: en_US
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/5wt3wa

碩士 === 國立交通大學 === 機械工程系所 === 93 === The preliminary design and performance evaluation of a radio frequency MEMS gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor (SAWS) is presented in this work. In addition, the method to convert the transmitted power into exact particle displacement is introduced to predict the sensing resolution of this MEMS gyroscope. Microelectromechanical systems (MEMS) sensors have received more attention over the last decade. They generally have the advantages of being lightweight, small in size, low power consumption and low cost, due to standard IC fabrication techniques. The gyroscopes, operated on the surface acoustic wave, are expected to have a better performance limitations over current MEMS vibratory gyroscope designs, for example, low cost, better robustness and reliability.