Application of Piezoelectric Bimorphs in Position Control
碩士 === 國立交通大學 === 機械工程系所 === 93 === A technique of precision position control in sub-micrometer scale using piezoelectric bimorph actuator is presented in this thesis. Mathematical model for structural vibration of the piezoelectric bimorph is derived by Hamilton’s principle. A half-bridge system...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94313280823713807324 |