| Summary: | 碩士 === 國立彰化師範大學 === 機電工程學系 === 93 === Sensors of infrared ray have quite extensive application for many domains. No matter national defense or medical diagnosis system are correlative to the infrared ray which detected by CMOS MEMS sensor. Thermoelectric transducer can be fabricated by MEMS technology, and it obtains better performance while front etching to fabricate v-groove. Etching windows would be opened in the front side and the silicon substrate under the membrane is etched. Standard CMOS process is suitable sensor implemented and it can fabricate a mounts of products and it also reduce the cost for sensor.
Photodiode is another kind of sensor which is also implemented by standard CMOS process, and diverse structures of contact and via on the top of photodiode must absorb specific wavelength. Photonic crystal can be also fabricated by using CMOS process and Diameter and Pitch can design the range of specific wavelength.
Readout circuit is also an important key point for SOC architecture. There are two kinds of readout circuit about three transistor（3T） and VTC, WTA, Current Mirror and Buffer combined.
SOC is the main architecture of thermal tracking image. Thermopiles and photodiodes are sensors in the system. We employ winner take all（WTA）circuit to track the detected body where it is.
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