| Summary: | 碩士 === 國立東華大學 === 材料科學與工程學系 === 93 === Abstract
In this experiment we want to construct a Flat-Flame MOCVD (FFMOCVD) system to produce Al2O3 nanopowders. The flame method has an advantage of producing high purity and low agglomeration nanopowders. In the low pressure environment particle collision frequency is reduced so the final particle size is reduced. Nanopowders which produced by Flat-Flame MOCVD method can be low agglomeration with careful process control, so that the secondary particle size is also reduced. The characters of the powder will be discussed with effect of burner size, gas flow ratio, precursor temperature and gap distance. These parameters affect the flame temperature, which controls the nanoparticle morphology. The possible effect of parameters on coalescence and growth of the nanoparticles are discussed. We can control process parameters and found the nanoparticles formed have excellent properties with primary particle size under 10 nm, and secondary particle size about 40 nm.
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