Effects of Annealing Process on AZO Transparent Conductive Oxide Film
碩士 === 國立屏東科技大學 === 機械工程系 === 93 === The purpose of this study is to deposite AZO transparent conductive film on corning glass substrate using radio frequency magnetron sputtering, then treats AZO thin film in laser annealing. Meanwhile, the effects of process parameters on resistivity are investiga...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/41785583565286333088 |