A Study of the AlN Thin Film by Ion Beam Sputtering

碩士 === 國立中山大學 === 材料科學研究所 === 93 === none

Bibliographic Details
Main Authors:	Meng-feng Wu, 吳孟峰
Other Authors:	Der-shin Gan
Format:	Others
Language:	zh-TW
Published:	2005
Online Access:	http://ndltd.ncl.edu.tw/handle/71484434270927090974

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spelling	ndltd-TW-093NSYS51590342015-12-23T04:08:15Z http://ndltd.ncl.edu.tw/handle/71484434270927090974 A Study of the AlN Thin Film by Ion Beam Sputtering 以離子束濺鍍法成長氮化鋁薄膜之研究 Meng-feng Wu 吳孟峰碩士國立中山大學材料科學研究所 93 none Der-shin Gan 甘德新 2005 學位論文 ; thesis 123 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立中山大學 === 材料科學研究所 === 93 === none
author2	Der-shin Gan
author_facet	Der-shin Gan Meng-feng Wu 吳孟峰
author	Meng-feng Wu 吳孟峰
spellingShingle	Meng-feng Wu 吳孟峰 A Study of the AlN Thin Film by Ion Beam Sputtering
author_sort	Meng-feng Wu
title	A Study of the AlN Thin Film by Ion Beam Sputtering
title_short	A Study of the AlN Thin Film by Ion Beam Sputtering
title_full	A Study of the AlN Thin Film by Ion Beam Sputtering
title_fullStr	A Study of the AlN Thin Film by Ion Beam Sputtering
title_full_unstemmed	A Study of the AlN Thin Film by Ion Beam Sputtering
title_sort	study of the aln thin film by ion beam sputtering
publishDate	2005
url	http://ndltd.ncl.edu.tw/handle/71484434270927090974
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A Study of the AlN Thin Film by Ion Beam Sputtering

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