A Study of the AlN Thin Film by Ion Beam Sputtering
碩士 === 國立中山大學 === 材料科學研究所 === 93 === none
Main Authors: | Meng-feng Wu, 吳孟峰 |
---|---|
Other Authors: | Der-shin Gan |
Format: | Others |
Language: | zh-TW |
Published: |
2005
|
Online Access: | http://ndltd.ncl.edu.tw/handle/71484434270927090974 |
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