Characterization and application of diamond-like carbon materials

• Main Authors: Chou-ting Guo, 郭秋廷
• Other Authors: Uerng-Yih Ueng
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/05812224320416326752

博士 === 國立中山大學 === 電機工程學系研究所 === 93 === Diamond-Like carbon (DLC)films have received a considerable amount ofwear resistant overcoat and biocompatible coatings. attention recently due to their chemical stability, high optical transparency and hardness. These properties make the films suitable for a number of applications such as protective and anti-reflection coating. Due to environmental pollution, double or multilayered coatings were recently developed as a new generation of protective coating. The present development hybrid coating system HBS900,is combination of hard coatings titanium nitride (TiN) and titanium carbonitride (TiCN) as multilayer are generated by cathode arc vaporization and magnetron sputtering, then on it following is high quality of diamond-like carbon film deposited by high degree of ionization, high densities of ions of electron cyclotron resonance plasma in the same recipient. It made the tools longer lifetime combination of outer lubrication layer. Not only using the high resistance and wear out of the inter multilayer, but also increasing the adhesion of DLC. The structural characteristics of DLC films were investigated by Raman spectroscopy, standard scratch, pin-on-disk test and microhardness. It made the film more graphite-like by higher substrate bias, higher process pressure, and higher ECR power The characteristics of the back stamper surface coated by DLC film were improved, and the productivity of an optical disk per stamper was estimated at about 1.7 times more than obtained. The properties of DLC films coating on the tamper were obtained and summarized as follows: excellent adhesion 65N, and coefficients of friction less than 0.15. As a result of adapting a microdrill coated with DLC film, the drilling lifetime was significantly improved to reach about 2.5 times than that of the uncoated one. The purpose of this research was to deposit the protective diamond-like carbon (DLC) films on polycarbonate substrates for optical applications. The oxygen plasma pretreatment of the substrate surface, silicon-incorporated diamond-like carbon films (DLC-Si), and the coating deposition conditions can enhance the adhesion of the DLC film. The coated DLC film showed better adhesion on the PC substrate surface under three tests as the alcohol rub test, a tape pull test, and a thermal shock test. The reactive CH4 (30sccm), the substrate bias (-100 V), the RF power (300 W), and In experiments, it is preceded being focus on the analysis of Raman spectrum for the films grown at various CH4 gas fluxes, substrates bias voltages, and higher si-doping concentrations made the film the better characteristics, the lower surface roughness, and higher hardness and adhesion. At least, the properties of diamond-like carbon (DLC) film coatings on phase-change recording media were characterized by Raman spectroscopy, atomic force microscope (AFM), UV-visible spectrometer and disc testers. The dependence of mechanical, optical and structural properties of DLC films included the characteristics of surface roughness, hardness, transmittance and electrical signals of discs on serveral DLC film thicknesses were investigated. Our experimental results indicate that DLC films provide a suitable coating to protect PC substrate and make it no difference for data stored on phase-change optical discs.