Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 93 === This study presents a novel concept to integrated nebulizer nozzle plate for FD-ESI (Fused-droplet Electrospary Ionization Mass Spectrometry) using modified LIGA process. This fabrication technique can reduce the production cost of current nozzle plate. It c...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
|
Online Access: | http://ndltd.ncl.edu.tw/handle/47043878354735470755 |
id |
ndltd-TW-093NSYS5490021 |
---|---|
record_format |
oai_dc |
spelling |
ndltd-TW-093NSYS54900212015-12-23T04:08:13Z http://ndltd.ncl.edu.tw/handle/47043878354735470755 Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry 微射出成型於霧化器之製作及其於FD-ESI質譜分析儀之應用 Chien-chung Chang 張建忠 碩士 國立中山大學 機械與機電工程學系研究所 93 This study presents a novel concept to integrated nebulizer nozzle plate for FD-ESI (Fused-droplet Electrospary Ionization Mass Spectrometry) using modified LIGA process. This fabrication technique can reduce the production cost of current nozzle plate. It comprises of multi-exposure and single develop (MESD) process, the extra-hard Ni-Co (Nickel-Cobalt) electroforming and thin-wall plastic microinjection molding. The template of nozzle plate is patterned using dry film and MESD process. Later, the template is transferred into metal Ni-Co mold by electroplating. In this study, the technique of extra-hard Ni-Co alloy electroplating process with Hardness of Vickers over (HV) 550 is developed. Then with the stiffness of Ni-Co mold, it can withstand high injection speed. Thin-wall microinjection molding process with short cycle time to fabricate nozzle plate can be finished. Liquid crystal polymer (LCP) is used for thin-wall microinjection molding process. In order to make efficiently atomization, we used ANSYS to optimize PZT actuator. Besides, the work of nebulizer with FD-ESI was demonstrated in this study. a novel design of nozzle plate. Cheng-tang Pan 潘正堂 2005 學位論文 ; thesis 74 zh-TW |
collection |
NDLTD |
language |
zh-TW |
format |
Others
|
sources |
NDLTD |
description |
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 93 === This study presents a novel concept to integrated nebulizer nozzle plate for FD-ESI (Fused-droplet Electrospary Ionization Mass Spectrometry) using modified LIGA process. This fabrication technique can reduce the production cost of current nozzle plate. It comprises of multi-exposure and single develop (MESD) process, the extra-hard Ni-Co (Nickel-Cobalt) electroforming and thin-wall plastic microinjection molding. The template of nozzle plate is patterned using dry film and MESD process. Later, the template is transferred into metal Ni-Co mold by electroplating. In this study, the technique of extra-hard Ni-Co alloy electroplating process with Hardness of Vickers over (HV) 550 is developed. Then with the stiffness of Ni-Co mold, it can withstand high injection speed. Thin-wall microinjection molding process with short cycle time to fabricate nozzle plate can be finished. Liquid crystal polymer (LCP) is used for thin-wall microinjection molding process. In order to make efficiently atomization, we used ANSYS to optimize PZT actuator. Besides, the work of nebulizer with FD-ESI was demonstrated in this study. a novel design of nozzle plate.
|
author2 |
Cheng-tang Pan |
author_facet |
Cheng-tang Pan Chien-chung Chang 張建忠 |
author |
Chien-chung Chang 張建忠 |
spellingShingle |
Chien-chung Chang 張建忠 Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry |
author_sort |
Chien-chung Chang |
title |
Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry |
title_short |
Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry |
title_full |
Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry |
title_fullStr |
Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry |
title_full_unstemmed |
Fabrication of Integrated Nebulizer Nozzle Plate Utlizing Micro-molding for FD- ESI Mass Spectrometry |
title_sort |
fabrication of integrated nebulizer nozzle plate utlizing micro-molding for fd- esi mass spectrometry |
publishDate |
2005 |
url |
http://ndltd.ncl.edu.tw/handle/47043878354735470755 |
work_keys_str_mv |
AT chienchungchang fabricationofintegratednebulizernozzleplateutlizingmicromoldingforfdesimassspectrometry AT zhāngjiànzhōng fabricationofintegratednebulizernozzleplateutlizingmicromoldingforfdesimassspectrometry AT chienchungchang wēishèchūchéngxíngyúwùhuàqìzhīzhìzuòjíqíyúfdesizhìpǔfēnxīyízhīyīngyòng AT zhāngjiànzhōng wēishèchūchéngxíngyúwùhuàqìzhīzhìzuòjíqíyúfdesizhìpǔfēnxīyízhīyīngyòng |
_version_ |
1718156126435934208 |