| Summary: | 碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 93 === Recently surface plasmon polaritons phenomena were widely studied and discussed, because their unique optical properties can be used for the fabrication of novel optical components. By using the metallic hole-array structures with sub-wavelength scales, transmittance can be dramatically enhanced due to the surface plasmon polaritons effect between dielectric and metal layers. Conventional semiconductor processes were used to fabricate two-dimensional periodic hole-arrays for study the behavior of surface plasmon polaritions on low refractive index and high refractive index materials. In the thesis, we found that the resonance transmittance of the surface plasmon polaritons on high refractive index materials is much smaller than on the low refractive index materials. By coating a SiO2 film on high refractive index materials, it would enhance the transmittance based on surface plamon polartons effects up to seven times. This metal-dielectric-metal (M-D-M) structure also induced the Fabry-Perot resonance. We also studied the parameters that influenced the surface plasmon polaritons effect：(1) the diameters of the metallic holes, (2) the thickness of the SiO2 films, (3) the thickness of the metal films, (4) the arrangement of the hole-arrays, (5) the kind of metal films, to optimize the surface plasmon polaritons effect. By using the characteristics of the surface plasmon polaritons that cannot be induced by the s-polarized light, but it can be induced by the p-polarized light. And the transmission resonance wavelength can be tuned by changing the period of the metallic hole-array. We can fabricate the novel polarizers and color filters by semiconductor processes.
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