Characteristics Measurement and Startup Control of MEMS Scanning Mirror
碩士 === 國立臺灣大學 === 電機工程學研究所 === 93 === Recently, researches in Micro-Electro-Mechanical System (MEMS) never stop and enhance step by step. New ideas and applications are also found continuously. Today many things in the traditional applications have been replaced by the mature product of the MEMS suc...
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| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60865876822206459204 |