| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === As the application aspect of Scanning Probe Microscopy is getting wider, the key actuator component satisfies various demands in the application, to increase the positioning precision and actuating stability or to adapt to the testing environment. The purpose of this thesis is to develop a two-dimensional piezoelectric actuator suitable for Scanning Probe Microscopy, the actuator is used for driving the scanning probe or the measured component, providing large scale scanning as well as fast positioning of the scanning probe. The inchworm motion is used as the actuating principle, in order to avoid actuating instability caused by multi axial fold structure and to enhance the compactness of the actuator, the two-dimensional actuators are combined on the same plane, the electromagnetically absorbing way is adopted to replace the traditional clamp mechanism, and simplification of the structure makes it easier to produce a coplanar motion. By utilizing a fixed guiding plane and a movable guiding plane, the two-dimensional actuating function is combined, and it offers an accurate and a steady displacement guiding of the actuator.
Actuator of each dimension consists of two electromagnetic suckers and a piezotube, the absorbing force of the electromagnetic sucker can be altered by controlling the magnitude and polarity of electric current, and thus allows the deformation accumulation of the actuator which results in long stroke and reciprocating displacement. Magnetic field combination of permanent magnet and electromagnetic coil produce the overall electromagnetic sucker magnetic field which is cooperated with proper magnetic circuit design, the permanent magnet offers the magnetic absorbing strength to stabilize the position while power disconnected, moreover, the electromagnetic coil is used for releasing the sucker magnetism’s absorbing force while actuating. The absorbing performance of magnetic sucker and the actuating performance of actuator were carried out into deep discussion by experimental testing and analyzing of various types of simulation, and thus figured out various kinds of factors which affect its efficiency.
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