Development and Research of A Two-dimensional Piezoelectric Inchworm Actuator with Magnetic Suckers
碩士 === 國立臺灣大學 === 機械工程學研究所 === 93 === As the application aspect of Scanning Probe Microscopy is getting wider, the key actuator component satisfies various demands in the application, to increase the positioning precision and actuating stability or to adapt to the testing environment. The purpose of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25734144839481314788 |