Control System Design of the Atomic Force Microscope Probe

• Main Authors: Zheng-Lin Li, 李政霖
• Other Authors: Chung-Feng Kuo
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/56792232354606184313

碩士 === 國立臺灣科技大學 === 高分子工程系 === 93 === Most of the distributed parameter control system designs are based on reduced-order models, which often result in computation errors and “control and observation spillover” problems. Therefore, developing a realizable controller which cannot only stabilize all the vibration modes but also make the atomic force microscope probe system efficient for good tracking is crucial. To achieve this purpose, this thesis is intended to examine the dynamic modeling and the precise control of the atomic force microscope probe. First, the equations of motion and the associated boundary conditions of the atomic force microscope probe are derived from Hamilton’s principle. Then, the open loop transfer function is obtained from the Laplace transform of the equations of motion. The Matlab is used to find all the poles and zeros of the corresponding open loop system, and its result has been proved by Martin’s theorem. It is shown that in the collocated control where the actuator and sensor are at the same locations, all the poles and zeros of the open loop transfer function will interlace along the imaginary axis. The augmented root locus method is used to design the controllers for the closed loop system. The mode summation method is applied to simulate the corresponding control system design. PD controller scheme, washout circuit controller, and lead compensator scheme show successful control over the atomic force microscope probe. According to computer simulation results, the system’s vibration for these designed controllers can be eliminated due to moving all the poles of the closed loop system into the left half plane, which also produces precise tracking. The designed controllers are all robust and easy to implement for the corresponding closed loop systems in reality.