Electrical measurement of one-dimensional composite nanowires and its application for gas sensor.

• Main Authors: Hsin-Li Chen, 陳新立
• Other Authors: Kuei-Hsien Chen
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/44562460085124743491

碩士 === 國立雲林科技大學 === 電子與資訊工程研究所 === 93 === In the this work, one-dimensional composite materials of the gold nanopartical embedded in an amorphous silicon nanowire was synthesized by microwave plasma enhance chemical vapor deposition (MWPECVD) system on the SiNx thin film with coating a gold film. Growth of the one-dimensional composite nanowires is not easy, because the plasma environment in the chamber with a little variation, the silica nanowires will be synthesized instead of the composite nanowires. We used the silica nanowires of the different conditions to detect nitrogen and oxygen respectively, and High Resolution Scanning Electron Microscopy (HRSEM), Electron Beam Lithography (EBL) were used for fabrication electrode and electrical measurement of one-dimensional composite nanowires and silica nanowire.