Development of the Fabrication Method for Refractive Microlens Array Mold of Thin Film

• Main Authors: Cheng-chian Yu, 余承謙
• Other Authors: Jeng-Rong Ho
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/06652409059475200232

碩士 === 國立中正大學 === 機械工程所 === 94 === With the progress of micro-component and micro-system technology in recent years, micro-optics has already become a hot research field. The optics can roughly be divided into a diffracting type and refracting type, the main of this text is that the new method of refracting optic-component was developed. Using spin coating, Excimar laser forming and soft replica molding fabricate a variety of the optic components. The main characteristic of this study is Excimer laser forming technology to utilize, and break through traditional person who is expose way that develop produce. Using physical method fabricate micro-curved surface. Utilize PDMS mold to form convex and concave two kinds of soft mold of shape of the microlens at the same time. It is common characteristic to be simple to make step in that make these develop with chemistry etching, it is low to mostly reach the purpose and cost for the physics way, the good stability of quality, so that can be suitable forming amount is produced.