Characteristics of Transparent Conducting ZnO:Al Thin Films Prepared by Reactive RF Magnetron Sputtering
碩士 === 正修科技大學 === 電子工程研究所 === 94 === In this study, the reactive rf magnetron sputtering was used to deposit Aluminum-doped zinc oxide (AZO) thin films on corning 7059 glass substrate at room temperature. The thermal treatment procedure was carried out to improve the electrical characteristics and o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39267349818850566609 |