Study on Hot Embossing Characteristics in Micro-channel for Biochip

• Main Authors: Ying-Chieh Wang, 王膺傑
• Other Authors: Shia-Chung Chen
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/41967592006585293232

碩士 === 中原大學 === 機械工程研究所 === 94 === Polymers have a great potential to be used for BioMEMS applications because many polymers are low cost, can be processed easily, and possess a broad range of physical and chemical properties. In this study, the micro-channel array with 30μm in depth, 100μm in width and 50μm in pitch had designed. And another pattern with different aspect ratio had also designed. The UV light was used to transfer the pattern on SU-8 photoresist, and the Ni-Co based stamp was made by electroforming. PMMA and PC sheet of 70 ㎜ and 45㎜in diameter and 1 mm in thickness was utilized as molding substrate. 3D laser microscope was used to measure the width, depth and sidewall draft angle of the micro-channels. The processing conditions studied include embossing force, embossing temperature, and embossing time. It was found that embossing force and embossing temperature are two key parameters affecting the molding accuracy significantly. Increasing embossing temperature will make the melt more soften and lower the viscosity of melt to reach good accuracy of imprint depth and width, but the cycle time also increased. All the accuracies of the imprint depth, width and draft angle increase with the applied embossing force until the associated dimensions reach saturated values. Increase of embossing time would increase the replication accuracy. Different aspect ratio micro-channels molding experimental shows that small channel is easily molding. From this study, it will lead to a better understanding on the molding characteristics of hot embossing for the fabrication of micro-channels within a polymer substrate. The study also provides research worker a molding guideline for molded biochip devices.