Effect of processing parameters for black matrix with black resin on its properties in color filter application
碩士 === 崑山科技大學 === 電機工程研究所 === 94 === The black matrix used in traditional color filter is produced with chromium and its oxide and nitride material. It is usually made by sputtering and followed by etching process. The process needs expensive vacuum system, and chromium is hazardous to environment....
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| Format: | Others |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37775824226327883758 |
| Summary: | 碩士 === 崑山科技大學 === 電機工程研究所 === 94 === The black matrix used in traditional color filter is produced with chromium and its oxide and nitride material. It is usually made by sputtering and followed by etching process. The process needs expensive vacuum system, and chromium is hazardous to environment. Therefore, black resin is the new selection for black matrix material in newly built color filter production line.
This study introduces a series of processing parameters in black matrix production with black resin: spinning speed versus film thickness and optical density; exposure light source versus pattern resolution. It was also found the patterned film begins to peel if the developing time taking too long during lithography.
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