Automatic Defect Inspection and Enhancement for Patterned TFT-LCD Panel Surfaces

• Main Authors: Ying-Da Li, 李英達
• Other Authors: Jenn-Jier Lien
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/21805343060183460301

碩士 === 國立成功大學 === 資訊工程學系碩博士班 === 94 === We present a inspection system for patterned TFT-LCD panel surface. In addition, we also present a technique for defect classification. There are two major parts in our framework, image acquisition and image processing. What type of camera we have decided is Line-scan camera. Mandatory of a successful inspection system is the correct selection of relative angle between camera and illumination, which needs to reveal the defects to be detected. The preprocessing stage uses Gaussian Smoothing to remove noise and Histogram Equalization to obtain a uniform lighting. Because some defects are too slight to recognize, using 2-D Wavelet Transformation to enhance defects. In automatic defect detecting stage, presenting three methods, Histogram Threshold、Difference of Block Mean and Sobel Edge. According to the experiment, we decided the best one among methods. In order to help the follow-up movement for defected panel, we classify defects and decide damaging degree according to the characteristic of defects.