The Development and Application of Computer Integrated Manufacturing System for Semiconductor Equipment Management

• Main Authors: Yi-Ming Sun, 孫以明
• Other Authors: Rong-Kwei Li
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/30203936149177269225

碩士 === 國立交通大學 === 管理學院碩士在職專班工業工程與管理組 === 94 === By the end of the last century, the electronics industry had become the largest industry in the world. The most important sector of this industry is the manufacturing of integrated circuits. In the past, the demands of reducing cost have decreased the size of chips, increased the wafer diameters and have improved yield. The Statistical Process Control method was applied to improve yield. As chip shrinkage technology moves into the era of nano-science, chip makers are considering various opportunities to reduce cost through manufacturing efficiency improvement. The application of information technology plays a key role in improving the manufacturing efficiency of integrated circuits, for example, the implementation of APC/AEC and real-time monitors. The SEMI standards for equipment automation provide a standard protocol for collecting information. However, to know how to use information collected is a greater challenge than simply collecting it. In this paper we summarize the past development of CIM applications to IC manufacturing industry, and describe the framework of CIM function modules that support the management of manufacturing equipment.