Preparation of Highly Flat Transparent Conductive Thin Film by RF Magnetron Sputtering Using Al-doped ZnO Nanotargets

碩士 === 國立交通大學 === 材料科學與工程系所 === 94 ===

Bibliographic Details
Main Authors: Yi-Feng Hsieh, 謝宜峰
Other Authors: T.-E. Hsieh
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/04027175750787118594