The Study of Lithium Niobate Thin Films by RF Sputtering Method
博士 === 國立中央大學 === 光電科學研究所 === 94 === Abstract Very high quality LiNbO3 films were deposited on both silicon and quartz substrates for the applications of surface acoustic wave and optical waveguide by RF magnetron sputtering. We have investigated the dependence of the surface morphology, texture, cr...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35494896255427060073 |