Effect of underlying metals and emitter patterns on the field emission properties of CNT diode devices
碩士 === 國立嘉義大學 === 光電暨固態電子研究所 === 94 === The present paper mainly was used the microwave plasma enhanced-chemical vapor deposition(MP-CVD) growing carbon nanotube (CNTs) by (Ni) the array (10μm x 10μm) and different spaces (20μm、15μm、10μm、5μm) with four different metals (TiN,Ti,Ta) to be the barrier...
Main Authors: | Jen-Hao Hsu, 許仁豪 |
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Other Authors: | Tsung-Lung Li |
Format: | Others |
Language: | zh-TW |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/92739368315904563539 |
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