| Summary: | 碩士 === 國立東華大學 === 電機工程學系 === 94 === This thesis focuses on the topics concerning about modeling and
tracking control of a two dimensional piezopositioning stage. In the
system modeling, a second-order mass-spring-damping system with a
hysteresis dynamics is used to represent the dynamic behavior of the
piezopositioning stage. To identify the unknown parameters used in the
system modeling, we adopt the Powell’s method of a numerical
optimization mechanism. Then, experimental results are to validate the
mathematic model.
The positioning accuracy of the piezopositioning stage is often
deteriorated due to the nonlinear hysteresis phenonmeon. To improve the
traditional proportional-integral (PI) controller, we develop on
observer-based sliding-mode controller plus the traditional PI controller
for positioning. The observer is a Luenberger-like observer and is used to
estimate the hysteresis phenomenon. To validate the proposed control
approach of the observer-based sliding-mode PI control, a PC-based
control system is implemented and the experimental results are illustrated
in this thesis.
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