Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach
碩士 === 國立東華大學 === 電機工程學系 === 94 === This thesis focuses on the topics concerning about modeling and tracking control of a two dimensional piezopositioning stage. In the system modeling, a second-order mass-spring-damping system with a hysteresis dynamics is used to represent the dynamic behavior of...
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ndltd-TW-094NDHU54420232015-12-16T04:39:01Z http://ndltd.ncl.edu.tw/handle/57968588206403920117 Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach 應用具有估測器之順滑模式比例積分控制於二維式壓電定位平台之精密定位控制 Chen-Chien Hsu 徐家祥 碩士 國立東華大學 電機工程學系 94 This thesis focuses on the topics concerning about modeling and tracking control of a two dimensional piezopositioning stage. In the system modeling, a second-order mass-spring-damping system with a hysteresis dynamics is used to represent the dynamic behavior of the piezopositioning stage. To identify the unknown parameters used in the system modeling, we adopt the Powell’s method of a numerical optimization mechanism. Then, experimental results are to validate the mathematic model. The positioning accuracy of the piezopositioning stage is often deteriorated due to the nonlinear hysteresis phenonmeon. To improve the traditional proportional-integral (PI) controller, we develop on observer-based sliding-mode controller plus the traditional PI controller for positioning. The observer is a Luenberger-like observer and is used to estimate the hysteresis phenomenon. To validate the proposed control approach of the observer-based sliding-mode PI control, a PC-based control system is implemented and the experimental results are illustrated in this thesis. Hsin-Jang Shieh 謝欣然 2006 學位論文 ; thesis 120 zh-TW |
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碩士 === 國立東華大學 === 電機工程學系 === 94 === This thesis focuses on the topics concerning about modeling and
tracking control of a two dimensional piezopositioning stage. In the
system modeling, a second-order mass-spring-damping system with a
hysteresis dynamics is used to represent the dynamic behavior of the
piezopositioning stage. To identify the unknown parameters used in the
system modeling, we adopt the Powell’s method of a numerical
optimization mechanism. Then, experimental results are to validate the
mathematic model.
The positioning accuracy of the piezopositioning stage is often
deteriorated due to the nonlinear hysteresis phenonmeon. To improve the
traditional proportional-integral (PI) controller, we develop on
observer-based sliding-mode controller plus the traditional PI controller
for positioning. The observer is a Luenberger-like observer and is used to
estimate the hysteresis phenomenon. To validate the proposed control
approach of the observer-based sliding-mode PI control, a PC-based
control system is implemented and the experimental results are illustrated
in this thesis.
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author2 |
Hsin-Jang Shieh |
author_facet |
Hsin-Jang Shieh Chen-Chien Hsu 徐家祥 |
author |
Chen-Chien Hsu 徐家祥 |
spellingShingle |
Chen-Chien Hsu 徐家祥 Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach |
author_sort |
Chen-Chien Hsu |
title |
Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach |
title_short |
Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach |
title_full |
Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach |
title_fullStr |
Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach |
title_full_unstemmed |
Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach |
title_sort |
precise tracking of a two-dimensionalpiezopositioning stage using observer-based sliding-mode pi control approach |
publishDate |
2006 |
url |
http://ndltd.ncl.edu.tw/handle/57968588206403920117 |
work_keys_str_mv |
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