Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach

• Main Authors: Chen-Chien Hsu, 徐家祥
• Other Authors: Hsin-Jang Shieh
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/57968588206403920117

碩士 === 國立東華大學 === 電機工程學系 === 94 === This thesis focuses on the topics concerning about modeling and tracking control of a two dimensional piezopositioning stage. In the system modeling, a second-order mass-spring-damping system with a hysteresis dynamics is used to represent the dynamic behavior of the piezopositioning stage. To identify the unknown parameters used in the system modeling, we adopt the Powell’s method of a numerical optimization mechanism. Then, experimental results are to validate the mathematic model. The positioning accuracy of the piezopositioning stage is often deteriorated due to the nonlinear hysteresis phenonmeon. To improve the traditional proportional-integral (PI) controller, we develop on observer-based sliding-mode controller plus the traditional PI controller for positioning. The observer is a Luenberger-like observer and is used to estimate the hysteresis phenomenon. To validate the proposed control approach of the observer-based sliding-mode PI control, a PC-based control system is implemented and the experimental results are illustrated in this thesis.