Precise Tracking of a Two-DimensionalPiezopositioning Stage Using Observer-Based Sliding-Mode PI Control Approach
碩士 === 國立東華大學 === 電機工程學系 === 94 === This thesis focuses on the topics concerning about modeling and tracking control of a two dimensional piezopositioning stage. In the system modeling, a second-order mass-spring-damping system with a hysteresis dynamics is used to represent the dynamic behavior of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57968588206403920117 |