Measurement of Residual Stresses in Thin Films Using Spiral Microstructures
碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 94 === ABSTRACT This research uses spiral microstructures to measure the residual stresses of the thin films for MEMS devices. In order to understand the effectiveness of the residual stresses on spiral microstructures, the formulation is derived and then the theo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23743389015620598924 |