A study on the damage layer of thinning silicon wafer with PCD shaver

A study on the damage layer of thinning silicon wafer with PCD shaver

碩士 === 國立清華大學 === 動力機械工程學系 === 94 ===

Bibliographic Details
Main Authors: Chun-Hong Chen, 陳春宏
Other Authors: Pei-Lum Tso
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/48734208437521993332
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spelling ndltd-TW-094NTHU53110652015-12-16T04:42:34Z http://ndltd.ncl.edu.tw/handle/48734208437521993332 A study on the damage layer of thinning silicon wafer with PCD shaver 多晶鑽石碟薄化矽晶圓之破壞層研究 Chun-Hong Chen 陳春宏 碩士 國立清華大學 動力機械工程學系 94 Pei-Lum Tso 左培倫 2006 學位論文 ; thesis 85 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 動力機械工程學系 === 94 ===
author2 Pei-Lum Tso
author_facet Pei-Lum Tso
Chun-Hong Chen
陳春宏
author Chun-Hong Chen
陳春宏
spellingShingle Chun-Hong Chen
陳春宏
A study on the damage layer of thinning silicon wafer with PCD shaver
author_sort Chun-Hong Chen
title A study on the damage layer of thinning silicon wafer with PCD shaver
title_short A study on the damage layer of thinning silicon wafer with PCD shaver
title_full A study on the damage layer of thinning silicon wafer with PCD shaver
title_fullStr A study on the damage layer of thinning silicon wafer with PCD shaver
title_full_unstemmed A study on the damage layer of thinning silicon wafer with PCD shaver
title_sort study on the damage layer of thinning silicon wafer with pcd shaver
publishDate 2006
url http://ndltd.ncl.edu.tw/handle/48734208437521993332
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AT chénchūnhóng duōjīngzuānshídiébáohuàxìjīngyuánzhīpòhuàicéngyánjiū
AT chunhongchen studyonthedamagelayerofthinningsiliconwaferwithpcdshaver
AT chénchūnhóng studyonthedamagelayerofthinningsiliconwaferwithpcdshaver
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